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Microfabrication and Multiphysics Investigation of Graphene-Based Gas Sensors with Engineered Metal Contacts

Research Status: In Progress

Research Area: Semiconductor Microfabrication | 2D Materials | Gas Sensors | Multiphysics Modeling

1- Project Overview

This self-initiated research concept aims to investigate the influence of metal-contact engineering and device architecture on the electrical characteristics and gas-sensing behavior of graphene-based devices.

Building on prior experience fabricating interdigitated microelectrodes with approximately 50 µm electrode gaps, the planned work will investigate symmetric and asymmetric metal-contact configurations, graphene integration, and electrical response under controlled oxygen and methane exposure.

The experimental approach will be supported by the design and development of a custom UV photolithography exposure system and COMSOL Multiphysics modeling of gas transport, surface adsorption, and sensor response.

The objective is to establish experimentally supported relationships between fabrication parameters, electrode interfaces, and sensing performance.

Methods: Photolithography, CAD, Thin-Film Metallization, Graphene Integration, I–V Characterization, Gas Sensing, COMSOL Multiphysics.

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